Facilities

Atomic Layer Deposition (ALD) reactor (Cambridge NanoTech, Savannah-100) and several home-made ones

Spectroscopic Ellipsometer (J. A. Woollam, M-2000U)

Plasma Etcher ( Yamato, PDC210)

UV–vis absorption spectrometer (Thermo fisher, NanoDrop 2000c)

UV Crosslinker (UVP, CL-1000s)

Atmosheric Furnace (Yamato, KDF 75)